1) Hybrid Lithography : Soft-lithography + Ion assisted aerosol lithography
- Well-ordered 3-D nanostructures in a large area with high throughput can be achieved using a variety of materials.
2) Creep assisted sequential Imprinting Technique
- Simple sequential imprinting method using mechanical creep-behavior of polymer
- The degree of freedom of structural shape is very high.
- Introducing the nano-patterns on the whole surface is possible.Well-ordered 3-D nanostructures in a large area with high throughput can be achieved using a variety of materials.
3) Multiplex lithography
- Multiscale Multilevel structures are can be easily fabricated via oxygen inhibition effect during photo-polymerization of PUA and the different curing degree of PUA membrane between bottom and top surface.